Investigation of the in-plane and out-of-plane electrical properties of metallic nanoparticles in dielectric matrix thin films elaborated by atomic layer deposition

TitreInvestigation of the in-plane and out-of-plane electrical properties of metallic nanoparticles in dielectric matrix thin films elaborated by atomic layer deposition
Type de publicationJournal Article
Year of Publication2017
AuteursThomas, D., E. Puyoo, M. Le Berre, L. Militaru, S. Koneti, A. Malchère, T. Epicier, L. Roiban, D. Albertini, A. Sabac, and F. Calmon
JournalNanotechnology
Volume28
Ticket45
Pagination455602
Date PublishedOct-11-2017
ISSN0957-4484
DOI10.1088/1361-6528/aa8b5e
Short TitleNanotechnology
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