Investigation of the in-plane and out-of-plane electrical properties of metallic nanoparticles in dielectric matrix thin films elaborated by atomic layer deposition

TitleInvestigation of the in-plane and out-of-plane electrical properties of metallic nanoparticles in dielectric matrix thin films elaborated by atomic layer deposition
Publication TypeJournal Article
Year of Publication2017
AuthorsThomas, D., E. Puyoo, M. Le Berre, L. Militaru, S. Koneti, A. Malchère, T. Epicier, L. Roiban, D. Albertini, A. Sabac, and F. Calmon
JournalNanotechnology
Volume28
Issue45
Pagination455602
Date PublishedOct-11-2017
ISSN0957-4484
DOI10.1088/1361-6528/aa8b5e
Short TitleNanotechnology
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