Titre | Eco-friendly soft nanoimprinting of TiO2 nanostructures with a large range of pattern heights |
Type de publication | Conference Paper |
Year of Publication | 2024 |
Auteurs | Ren, H., C. Chevalier, N. Crespo-Monteiro, A. Valour, N. Blanchard, D. Albertini, T. Benyattou, and C. Jamois |
Éditeur | von Freymann, G., E. Blasco, and D. Chanda |
Conference Name | Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII |
Publisher | SPIE |
Conference Location | San Francisco, United States |
URL | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/12898/3000169/Eco-friendly-soft-nanoimprinting-of-TiO2-nanostructures-with-a-large/10.1117/12.3000169.full |
DOI | 10.1117/12.3000169 |