Eco-friendly soft nanoimprinting of TiO2 nanostructures with a large range of pattern heights

TitreEco-friendly soft nanoimprinting of TiO2 nanostructures with a large range of pattern heights
Type de publicationConference Paper
Year of Publication2024
AuteursRen, H., C. Chevalier, N. Crespo-Monteiro, A. Valour, N. Blanchard, D. Albertini, T. Benyattou, and C. Jamois
Éditeurvon Freymann, G., E. Blasco, and D. Chanda
Conference NameAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII
PublisherSPIE
Conference LocationSan Francisco, United States
URLhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/12898/3000169/Eco-friendly-soft-nanoimprinting-of-TiO2-nanostructures-with-a-large/10.1117/12.3000169.full
DOI10.1117/12.3000169
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