AFM Bruker Dimension V

Microscope team

David Albertini (INL), Solène Brottet (INL)

Microscope overview

The 3100 Dimension is a microscope made by Bruker. It allows, thanks to a last generation Nanoscope V electronics, to perform high resolution atomic force microscopy.

This microscope is able to scan up to 6 inch samples thanks to it's head which is placed over the sample.

To optimize the experimentations it is equiped with anti-vibrations system : an active table on air coupled with a closed chamber.

• The classicals modes availables are : Contact; Lateral Force Microscopy; Tapping; Phase; Interleave; FM; Force Spectroscopy; Piezo Force Microscopy;
• The electrical modes availables, with particular plu-ins, are : Conductive AFM; SCM and Resistance mapping

Microscope features

The scanning range of the Bruker ceramic head is from 500nm to 50µm with an open loop.

A stage (Npoint scanning on X and Y) is available to replace the 6 inch stage. This stage allows to do images up to 100µm square and it's coupled with an effective repositionning système (close loop).

The electricals modules associated to this microscope are :

• TUNA module : realisation of current images with resolution from 1pA/v to 100nA/V
• SSRM module : localised measurement of resistivity 
• SCM module : qualitative measurements of localised doping

Photograph library

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