Characterization of Al2O3 Thin Films Prepared by Thermal ALD

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TitleCharacterization of Al2O3 Thin Films Prepared by Thermal ALD
Publication TypeJournal Article
Year of Publication2015
AuthorsBarbos, C., D. Blanc-Pelissier, A. Fave, E. Blanquet, A. Crisci, E. Fourmond, D. Albertini, A. Sabac, K. Ayadi, P. Girard, and M. Lemiti
JournalEnergy Procedia
Volume77
Pagination558 - 564
Date PublishedJan-08-2015
ISSN18766102
DOI10.1016/j.egypro.2015.07.080
Short TitleEnergy Procedia
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