Thierry Douillard (MATEIS), Nicholas Blanchard (ILM), Rémy Fulcrand (ILM), Cyril Langlois (MATEIS), Florent Dalmas (MATEIS), Solène Brottet (INL).
The FIB/SEM has been installed in CLYM since the beginning of 2010. It is a NVision 40 from Zeiss, composed of an electronic column Gemini I and an ionic column SIINT Zeta Ga+. The ionic column allows the sputtering of matter with a nanometric accuracy. It is therefore possible to modify or create samples with particular shapes or to analyse the material under the surface. The FIB/SEM possesses several accessories, such as :
The FIB/SEM is also equipped with the following detectors:
The device has been completed by an external 16 bit scanning system (FIBICS incorporated, Ottawa, CA) capable of controlling the electron and ion beam independently or simultaneously. This unit is driven by the NanoPatterning software and Visualisation Engine (NPVE) for complex etching and includes Atlas3D for FIB nanotomographies.
In conclusion, this equipment allows a great variety of experiments, such as nano-patterning, thin foil preparation for TEM analysis, 3D characterization, or ion imaging.
Within the context of a book writing entitled "FIB NANOSTRUCTURES" reporting an exhaustive state of the art of FIB various applications for the creation of nanostructures, an ILM team (CLYM partner) has been solicited for the radaction of a chapter titled "FIB Design for Nanofluidic Application". In this context, the authors have demonstrated that the use of the dual beam NVision 40 system present at CLYM gives access to a whole new application domain: the NanoFluidique.
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